Semiconductor Equipment
Service Case 3
Semiconductor Clean Equipment - Replacing Mercury Lamps with UVC LEDs
Pain Points：
Environmental Compliance
The client’s legacy systems used 255nm mercury lamps for organic material removal on 8-inch wafers. Compliance with the Minamata Convention on Mercury necessitated eliminating mercury lamps by 2021.
Short Lifespan
Mercury lamps degrade rapidly and require annual replacement.
Production Downtime
Mercury lamps require warm-up periods and frequent maintenance, causing production interruptions.
Thermal Solution
Heat simulation indicated the need for a water-cooled system to maintain chip temperatures (Tj) below 60°C.
Key Applications & Solutions：
Uniform High Irradiance
UVC LEDs were arranged in linear arrays for localized wafer irradiation, with the wafer spinning to ensure uniform exposure.
Violumas designed a reflective structure and fan-shaped aperture to balance dose distribution between the wafer center and edges.
Easy Maintenance
Lamp surfaces are covered with quartz plates for easy cleaning.
Cleanroom Compliance & Thermal Management
Air cooling was rejected due to cleanroom contamination concerns; water cooling was adopted to ensure cleanroom compatibility.
Extended LED Lifespan
Lower operating temperatures achieved with water cooling extended UVC LED life, minimized downtime, and maximized productivity.